Note: A method for estimating the resolution of nanopositioning systems
نویسندگان
چکیده
منابع مشابه
Note: a method for estimating the resolution of nanopositioning systems.
This Note describes a new technique for estimating the resolution of nanopositioning systems. By recording the voltage applied to an actuator and performing a filtering operation, the position noise and resolution can be estimated. This technique is simple to apply in practice and does not require any additional sensors or specialized equipment.
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2012
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.4739508