Note: A method for estimating the resolution of nanopositioning systems

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Note: a method for estimating the resolution of nanopositioning systems.

This Note describes a new technique for estimating the resolution of nanopositioning systems. By recording the voltage applied to an actuator and performing a filtering operation, the position noise and resolution can be estimated. This technique is simple to apply in practice and does not require any additional sensors or specialized equipment.

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ژورنال

عنوان ژورنال: Review of Scientific Instruments

سال: 2012

ISSN: 0034-6748,1089-7623

DOI: 10.1063/1.4739508